Advanced Technology (MS)

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M.S. in Advanced Technology with a focus in Semiconductor Processing and Nanomanufacturing Technology.

Offered Online

The M.S. in Advanced Technology is a course-based, advanced degree program designed for professionals who want to expand their knowledge, learn new skills, and advance their careers in the semiconductor and other advanced manufacturing industries. Focusing on the enabling technologies for semiconductor processing and nanomanufacturing, this pioneering program uses an applied learning approach that is centered on cutting edge patterning, fabrication, metrology, and device characterization methods for current and next-generation high volume manufacturing of nanoelectronics. Students in the program get unparalleled education from our world-class faculty.

Listen to Professor Unni Pillai describe the M.S. in Advanced Technology program

M.S. in Advanced Technology Students

Students admitted to the program typically have earned an engineering, engineering technology, chemistry, materials science, physics or similar baccalaureate degree. Transfer credits for post-baccalaureate courses or certificates may be considered for awarding advanced standing on a case-by-case basis. The online format of the program is tailored for a working professional's schedule.

Program Structure

The overarching structure of the Semiconductor Processing and Nanomanufacturing Technology focus encompasses the design and development of process flows for advanced design rules, material sets, and device architectures at its core. Designated electives allow our students to delve further into specific subjects, such as metrology and process control, reliability, lithography, data analytics, optoelectronics, or photonics. The coursework will be aptly supplemented with actual case studies that will teach systematic problem solving methodologies for yield and process issues. A step-by-step approach to following an industry-relevant ReRAM flow will provide hands-on experience in lot tracking and inspection practices over multiple process sectors including lithography, etch & CMP.

What You Will Study

Students complete 33 credits, split between core and elective coursework in subjects, such as:

  • Special Topics in Advanced Technology
  • Engineering and Society
  • Reliability and Quality Assurance
  • Semiconductor Processing
  • Semiconductor Metrology
  • Industrial Nanomanufacturing
  • Economic Principles of Nanotechnology Management
  • Competitiveness in Nanomanufacturing Industries
  • Innovation and Entrepreneurship in Nanotechnology

Students are not required to complete a thesis at the end of the program. 


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Detailed information, brochures and forms can be mailed to you upon request.


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