Integrated Circuit Fabrication

Focusing on enabling technologies in advanced manufacturing industries this course and research sequence uses an applied learning approach that is centered on cutting edge methods for current and next-generation high volume manufacturing in both advanced manufacturing and nanomanufacturing. This program leverages the vast on-site IC fabrication infrastructure and the on-site process flow development activities as well as the in depth knowledge generated with regards to engineering and nanomanufacturing economics required of the IC related industries.

Faculty members for research coursework: Profs. Nate Cady, Eric Eisenbraun, Spyros Galis, Ji Ung Lee, Serge Oktyabrsky, Unni Pillai, Shadi Shahedipour, Woongje Sung

NSCI 300 Integrated NanoLaboratory I (3 Cr - Fall)
Advanced laboratory training for undergraduates. This laboratory will promote hands-on use of advanced CNSE processing, characterization, and integration laboratories including selected toolsets for 200mm and 300mm wafer design, fabrication, processing and metrology. Course will focus on operating principles of selected processing, testing, and metrology tools.

NSCI 305 Integrated NanoLaboratory II (3 Cr - Spring)
Advanced laboratory training for undergraduates. This laboratory will promote hands-on use of advanced CNSE processing, characterization, and integration laboratories including selected toolsets for 200mm and 300mm wafer design, fabrication, processing and metrology. Course will focus on integration of processing, fabrication, and metrology tools for construction, analysis, and testing of device structures.

NENG 405 Micro and Nano Materials Processing Technology (4 Cr - Fall)
Provides a basic knowledge of manufacturing processes utilized in the fabrication of semiconductor devices in the 300 and 450 mm fab environment.  Processing that includes oxide deposition, photolithography, ion implantation, doping, passivation, etching, electroplating, planarization, etc. that are used in state-of-the-art fabrication of transistors, integrated circuits and similar device structures will be reviewed.  

NENG 407 Thin Film and Nanomaterials Characterization (4 Cr – Spring)
Provides an overview of state-of-the-art techniques used for examining nanoscale thin films. The use of optical microscopy, scanning electron microscopy, scanning probe microscopy any other electron beam instruments coupled with specific detectors for monitoring secondary electron and x-ray signals to examine nanomaterials and compositions, created by the impact of electron beams with nanostructured films will be discussed.

NENG 408 Industrial Nanomanufacturing (3 Cr - Spring)
Materials and manufacturing based on nanoprocess systems. Industrial engineering concepts are introduced and the student prepared to perform basic engineering tasks, including design of workstations, cells and lines. The key in operating a manufacturing facility is to make optimum use of all of the available resources including labor, capital, technology, materials and time. Quality systems will cover metrology and overall systems for industrial and service companies, including DOE, SPC, ISO, QS, TQM. The materials used in electronic manufacturing will be reviewed including materials and components that are used to produce chips and systems. DOE will cover statistical methods for determining settings of independent experimental variables, prior to experimentation, in order to make meaningful inferences based upon subsequent measurements or simulations.

NENG 400 Engineering Economics (3 Cr - Spring)
This course will equip students with economic concepts and techniques necessary for decision making in situations that engineers and technical managers typically face. The topics covered include cost estimation, cash flow analysis, rate of return analysis, incorporating risk in decision making, tax analysis and evaluating financial statements.

NENG 460 Economics of Nanomanufacturing (3 Cr - Fall)
Students will examine the pattern of technological evolution in six industries that have been affected by the advent of nanomanufacturing techniques: Semiconductors, Solar cells, Batteries, Light Emitting Diodes (LEDs), Liquid Crystal Displays (LCDs) and Biotechnology. A central focus of the course will be to understand the evolution of technology as a consequence of purposeful research and manufacturing decisions made by firms competing with each other. Game- theoretic models of completion will be used to understand strategic decisions made by firms in the industry and the resulting evolution of technology and market structure in the industry. The goal is to equip students with knowledge of the pattern of evolution of high technology industries, and to inform them of (i) Strategies to adopt as innovators and managers in these industries and (ii) Policies to adopt as government policymakers involved in using government policies to create desired economic outcomes.

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